Spampinato, ValentinaValentinaSpampinatoArmini, SilviaSilviaArminiFranquet, AlexisAlexisFranquetConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29477Self-focusing SIMS: a novel metrology for area-selective depositionMeeting abstracthttp://sims.confer.uj.edu.pl/boa_oral.php?id=147