Le, Quoc ToanQuoc ToanLeStruyf, HerbertHerbertStruyfBrongersma, SywertSywertBrongersmaConard, ThierryThierryConardBoullart, WernerWernerBoullartVanhaelemeersch, SergeSergeVanhaelemeerschMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7788Surface modification of porous low-k dielectricsProceedings paper