Maenhoudt, MireilleMireilleMaenhoudtPollentier, IvanIvanPollentierWiaux, VincentVincentWiauxVangoidsenhoven, DizianaDizianaVangoidsenhovenRonse, KurtKurtRonse2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5462248nm and 193nm lithography for damascene patterningJournal article