Hedgehog probe tips enabling high-resolution scanning probe microscopy

Boehme, ThijsThijsBoehmeHantschel, ThomasThomasHantschelWouters, LennaertLennaertWoutersFolkersma, StevenStevenFolkersmaParedis, KristofKristofParedisVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32574Hedgehog probe tips enabling high-resolution scanning probe microscopyMeeting abstract