Surdeanu, RaduRaduSurdeanuPonomarev, YouriYouriPonomarevCerutti, R.R.CeruttiPawlak, BartekBartekPawlakNanver, L.K.L.K.NanverHoflijk, IlseIlseHoflijkStolk, PeterPeterStolkDachs, CharlesCharlesDachsVerheijen, M.A.M.A.VerheijenKaiser, M.M.KaiserHopstaken, M.J.P.M.J.P.Hopstakenvan Berkum, J.G.M.J.G.M.van BerkumRoozeboom, F.F.RoozeboomLindsay, RichardRichardLindsay2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6862Laser annealing for ultra-shallow junction formation in advanced CMOSProceedings paper