Nucleation and growth of copper on Ru-based substrates: I. the effect of the inorganic components

Nagar, MagiMagiNagarVereecken, PhilippePhilippeVereeckenStrubbe, KatrienKatrienStrubbeRadisic, AlexAlexRadisic2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19471Nucleation and growth of copper on Ru-based substrates: I. the effect of the inorganic componentsMeeting abstract