Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devices

De Coster, JeroenJeroenDe CosterLing, FangzhouFangzhouLingWitvrouw, AnnAnnWitvrouwDe Wolf, IngridIngridDe Wolf2021-10-212021-10-212013-06https://imec-publications.be/handle/20.500.12860/22203Dedicated test structure for the measurement of adhesion forces between contacting surfaces in MEMS devicesProceedings paper