Characterization of nano-crystalline diamond films grown under continuous DC bias during plasma enhanced chemical vapor deposition

Mortet, VincentVincentMortetZhang, L.L.ZhangEckert, M.M.EckertSoltani, A.A.SoltaniD'Haen, JanJanD'HaenDouhéret, O.O.DouhéretMoreau, MyriamMyriamMoreauOsswald, SebastianSebastianOsswaldNeyts, E.E.NeytsTroadec, D.D.TroadecWagner, PatrickPatrickWagnerBogaerts, A.A.BogaertsVan Tendeloo, S.S.Van TendelooHaenen, KenKenHaenen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17656Characterization of nano-crystalline diamond films grown under continuous DC bias during plasma enhanced chemical vapor depositionProceedings paper