Large-area monocrystalline silicon thin-films by annealing of macroporous arrays: Understanding and tackling defects in the material

Depauw, ValerieValerieDepauwGordon, IvanIvanGordonBeaucarne, GuyGuyBeaucarnePoortmans, JefJefPoortmansMertens, RobertRobertMertensCelis, Jean-PierreJean-PierreCelis2021-10-172021-10-1720090021-8979https://imec-publications.be/handle/20.500.12860/15227Large-area monocrystalline silicon thin-films by annealing of macroporous arrays: Understanding and tackling defects in the materialJournal articlehttp://link.aip.org/link/?JAP/106/033516