Leonov, VladimirVladimirLeonovPerova, Natalia A.Natalia A.PerovaDe Moor, PietPietDe MoorDu Bois, BertBertDu BoisGoessens, ClausClausGoessensGrietens, BobBobGrietensVerbist, AgnesAgnesVerbistVermeiren, JanJanVermeiren2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7796Micromachined poly-SiGe bolometer arrays for infrared imaging and spectroscopyProceedings paper