Temperature activation of UTBOX SOI device characteristics with different source/drain engineering

Nicoletti, T.T.NicolettiAoulaiche, MarcMarcAoulaicheVeloso, AnabelaAnabelaVelosoSimoen, EddyEddySimoenClaeys, CorCorClaeysMartino, J.A.J.A.MartinoJurczak, GosiaGosiaJurczak2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21199Temperature activation of UTBOX SOI device characteristics with different source/drain engineeringProceedings paper