Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysis

Pacco, AntoineAntoinePaccoWada, MasayukiMasayukiWadaBearda, TwanTwanBeardaMertens, PaulPaulMertens2021-10-182021-10-1820091662-9779https://imec-publications.be/handle/20.500.12860/15962Drying of high aspect ratio structures: a comparison of drying techniques via electrical stiction analysisJournal article