How to make lithography patterns print: the role of OPC and pattern layout

De Bisschop, PeterPeterDe Bisschop2021-10-222021-10-2220152192-8584https://imec-publications.be/handle/20.500.12860/25126How to make lithography patterns print: the role of OPC and pattern layoutJournal articlehttp://www.degruyter.com/view/j/aot.2015.4.issue-4/aot-2015-0023/aot-2015-0023.xml