Brems, StevenStevenBremsPhommahaxay, AlainAlainPhommahaxayBoulon, Marie-EmmanuelleMarie-EmmanuelleBoulonVerguts, KenKenVergutsLeonhardt, AlessandraAlessandraLeonhardtKennes, KoenKoenKennesGroven, BenjaminBenjaminGrovenAlessandri, ChiaraChiaraAlessandriWu, Cheng HanCheng HanWuAchra, SwatiSwatiAchraVan Thourhout, DriesDriesVan ThourhoutAsselberghs, IngeIngeAsselberghsPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutGarello, KevinKevinGarelloParui, SubirSubirParuiDe Gendt, StefanStefanDe GendtHuyghebaert, CedricCedricHuyghebaert2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/326142D material integration in the semiconductor industry: Challenges and SolutionsMeeting abstract