Malhouitre, StéphaneStéphaneMalhouitreJehoul, ChristianeChristianeJehoulVan Aelst, JokeJokeVan AelstStruyf, HerbertHerbertStruyfBrongersma, SywertSywertBrongersmaCarbonell, LaureLaureCarbonellVos, IngridIngridVosBeyer, GeraldGeraldBeyerVan Hove, MarleenMarleenVan HoveGronbeck, D.D.GronbeckGallagher, M.M.GallagherCalvert, J.J.CalvertMaex, KarenKarenMaex2021-10-152021-10-152003-11https://imec-publications.be/handle/20.500.12860/7852Single damascene integration of porous zirkonTM version 1 low-k dielectric filmsJournal article