Guo, BinBinGuoWen, LianggongLianggongWenHelin, PhilippePhilippeHelinClaes, GertGertClaesVerbist, AgnesAgnesVerbistVan Hoof, RitaRitaVan HoofDu Bois, BertBertDu BoisDe Coster, JeroenJeroenDe CosterDe Wolf, IngridIngridDe WolfShahar, Abdul HadiAbdul HadiShaharLi, YunlongYunlongLiCui, HushanHushanCuiLux, MarcelMarcelLuxVereecke, GuyGuyVereeckeTilmans, HarrieHarrieTilmansHaspeslagh, LucLucHaspeslaghDecoutere, StefaanStefaanDecoutereOsman, HarisHarisOsmanPuers, BobBobPuersSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouw2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19023Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometersProceedings paper