On-chip non-dispersive infrared CO2 sensor based on an integrating cylinder+

Jia, XiaoningXiaoningJiaRoels, JorisJorisRoelsBaets, RoelRoelBaetsRoelkens, GuntherGuntherRoelkens2021-10-272021-10-272019-101424-8220https://imec-publications.be/handle/20.500.12860/33225On-chip non-dispersive infrared CO2 sensor based on an integrating cylinder+Journal articlehttps://doi.org/10.3390/s19194260