Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platform

Bedier, MohammedMohammedBedierRottenberg, XavierXavierRottenbergRochus, VeroniqueVeroniqueRochusAbdelRassoul, RoshdyRoshdyAbdelRassoulTilmans, HarrieHarrieTilmans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22029Triangular-shaped RF MEMS switched air gap capacitor in imec's SiGe-MEMS platformProceedings paper