A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonators

Dancila, DragosDragosDancilaEkkels, PhillipPhillipEkkelsRottenberg, XavierXavierRottenbergHuynen, IsabelleIsabelleHuynenDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16930A MEMS variable Faraday cage as tuning element for integrated silicon micromachined cavity resonatorsProceedings paper