Hurd, TraceTraceHurdMertens, PaulPaulMertensSchmidt, HaraldHaraldSchmidtDitter, D.D.DitterHall, L. H.L. H.HallMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/201The role of hydrogen peroxide in the SC2 cleanProceedings paper