Heyns, MarcMarcHeynsCornelissen, IngridIngridCornelissenDe Gendt, StefanStefanDe GendtDegraeve, RobinRobinDegraeveKnotter, D. M.D. M.KnotterMertens, PaulPaulMertensMertens, S.S.MertensMeuris, MarcMarcMeurisNigam, TanyaTanyaNigamRotondaro, AntonioAntonioRotondaroSchaekers, MarcMarcSchaekersTeerlinck, IvoIvoTeerlinckVos, RitaRitaVosWolke, K.K.Wolke2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2634Advanced cleaning and ultra-thin oxide technologyOral presentation