Travaly, YoussefYoussefTravalyBamal, MandeepMandeepBamalCarbonell, LaureLaureCarbonellTokei, ZsoltZsoltTokeiVan Olmen, JanJanVan OlmenIacopi, FrancescaFrancescaIacopiVan Hove, MarleenMarleenVan HoveStucchi, MicheleMicheleStucchiMaex, KarenKarenMaex2021-10-162021-10-162007-08https://imec-publications.be/handle/20.500.12860/12988On a more accurate assessment of scaled copper/low-k interconnects performanceJournal article