Radisic, AlexAlexRadisicLuhn, OleOleLuhnPhilipsen, HaroldHaroldPhilipsenEl-Mekki, ZaidZaidEl-MekkiHonore, MiaMiaHonoreRodet, SimonSimonRodetArmini, SilviaSilviaArminiDrijbooms, ChrisChrisDrijboomsBender, HugoHugoBenderRuythooren, WouterWouterRuythooren2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/19642Copper plating for 3D interconnectsJournal articlehttp://dx.doi.org/10.1016/j.mee.2010.06.030