Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films

Mallik, AwadeshAwadeshMallikRouzbahani Bayatani, RozitaRozitaRouzbahani BayataniLloret, FernandoFernandoLloretMary Joy, RaniRaniMary JoyHaenen, KenKenHaenen2024-08-052024-08-022024-08-0520232694-1112WOS:001252639400005https://imec-publications.be/handle/20.500.12860/44246Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films - a case studyJournal article10.1080/26941112.2023.2295346WOS:001252639400005SURFACE-ROUGHNESSHETEROGENEOUS NUCLEATIONSILICONTOPOGRAPHYCOATINGSDENSITY