Chiarella, ThomasThomasChiarellaKubicek, StefanStefanKubicekRosseel, ErikErikRosseelRitzenthaler, RomainRomainRitzenthalerHikavyy, AndriyAndriyHikavyyEyben, PierrePierreEybenDe Keersgieter, AnAnDe KeersgieterRagnarsson, Lars-AkeLars-AkeRagnarssonKim, Min-SooMin-SooKimChew, Soon AikSoon AikChewSchram, TomTomSchramDemuynck, StevenStevenDemuynckCupak, MiroslavMiroslavCupakRynders, LucLucRyndersDehan, MorinMorinDehanHoriguchi, NaotoNaotoHoriguchiMitard, JeromeJeromeMitardMocuta, DanDanMocutaMocuta, AndaAndaMocutaThean, AaronAaronThean2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26446Towards high performance sub-10nm finW bulk FinFET technologyProceedings paperhttp://ieeexplore.ieee.org/document/7599605/