Labyedh, NouhaNouhaLabyedhTimmermans, MarinaMarinaTimmermansMattelaer, FelixFelixMattelaerMees, MaartenMaartenMeesDetavernier, ChristopheChristopheDetavernierVereecken, PhilippePhilippeVereecken2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26869Novel method for conformal LiMn2O4 thin films fabrication on planar and 3D microstructure substratesProceedings paperhttps://ecs.confex.com/ecs/230/webprogram/Paper94968.html