Engelen, A.A.EngelenSocha, R.R.SochaHendrickx, EricEricHendrickxScheepers, W.W.ScheepersNowak, F.F.Nowakvan Dam, M.M.van DamLiebchen, ArminArminLiebchenFaas, D.D.Faas2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8885Implementation of pattern-specific illumination pupil optimization on Step & Scan systemsProceedings paper