Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuBeyer, GeraldGeraldBeyerVandervorst, WilfriedWilfriedVandervorst2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2420Advanced capabilities and applications of a sputter-RBS systemOral presentation