Finite element analysis of thermo-elastic modal damping of MEMS vibrations

Barauskas, R.R.BarauskasKausinis, S.S.KausinisDe Wolf, IngridIngridDe WolfStoffels, SteveSteveStoffelsTilmans, HarrieHarrieTilmans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11691Finite element analysis of thermo-elastic modal damping of MEMS vibrationsJournal article