Hardy, AnAnHardyVan Elshocht, SvenSvenVan ElshochtDewulf, DaanDaanDewulfClima, SergiuSergiuClimaPeys, NickNickPeysAdelmann, ChristophChristophAdelmannOpsomer, KarlKarlOpsomerFavia, PaolaPaolaFaviaBender, HugoHugoBenderHoflijk, IlseIlseHoflijkConard, ThierryThierryConardFranquet, AlexisAlexisFranquetVan den Rul, HeidiHeidiVan den RulKittl, JorgeJorgeKittlDe Gendt, StefanStefanDe GendtVan Bael, Marlies K.Marlies K.Van BaelMullens, J.J.Mullens2021-10-182021-10-1820100013-4651https://imec-publications.be/handle/20.500.12860/17226Properties of ultrathin high permittivity NbTaO films prepared by aqueous chemical solution depositionJournal articlehttp://ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=JESOAN000157000001000G13000001&idtype=cvips&gifs=Yes