Houssiau, L.L.HoussiauVitchev, R.G.R.G.VitchevConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstBender, HugoHugoBender2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7667Tof-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxidesOral presentation