Wong, PatrickPatrickWongDe Bisschop, PeterPeterDe BisschopRobertson, StewartStewartRobertsonVandenbroeck, NadiaNadiaVandenbroeckBiafore, JohnJohnBiaforeWiaux, VincentVincentWiauxVan de Kerkhove, JeroenJeroenVan de Kerkhove2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20157Investigation of litho1-litho2 proximity differences for a LPLE double patterning processProceedings paper