Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations

Heyvaert, IlseIlseHeyvaertVan Hove, MarleenMarleenVan HoveWitvrouw, AnnAnnWitvrouwMaex, KarenKarenMaexSaerens, AnneliesAnneliesSaerensRoussel, PhilippePhilippeRousselBender, HugoHugoBender2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3513Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizationsOral presentation