Micro-characterisation of Pt silicides prepared on (100) silicon

Jin, S.S.JinBender, HugoHugoBenderAlves Donaton, RicardoRicardoAlves DonatonMaex, KarenKarenMaex2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/1953Micro-characterisation of Pt silicides prepared on (100) siliconProceedings paper