Zhang, WenqiWenqiZhangBrongersma, SywertSywertBrongersmaConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstMaex, KarenKarenMaex2021-10-162021-10-162005-01https://imec-publications.be/handle/20.500.12860/11601Impurity determination in narrow copper linesProceedings paper