Impact of extreme UV mask flatness on resist roughness

Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidYounkin, ToddToddYounkinLeeson, MichaelMichaelLeesonPei-Yang, YanYanPei-Yang2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21662Impact of extreme UV mask flatness on resist roughnessOral presentation