Atanasova, TanyaTanyaAtanasovaCarbonell, LaureLaureCarbonellCaluwaerts, RudyRudyCaluwaertsTokei, ZsoltZsoltTokeiStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20312Ultra-low copper baths for sub-35nm copper interconnectsProceedings paper