Teodorescu, V.V.TeodorescuNistor, LeonaLeonaNistorBender, HugoHugoBenderSteegen, AnAnSteegenLauwers, A.A.LauwersMaex, KarenKarenMaexVan Landuyt, J.J.Van Landuyt2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5702In situ transmission electron microscopy study of Ni silicide phases formed on (001) Si active linesJournal article