Kaczer, BenBenKaczerDegraeve, RobinRobinDegraeveArkhipov, VladimirVladimirArkhipovGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162005-05https://imec-publications.be/handle/20.500.12860/10670Present reliability issues in ultrathin oxinitride filmsProceedings paper