Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantification

Morris, RichardRichardMorrisCuduvally, RamyaRamyaCuduvallyMelkonyan, DavitDavitMelkonyanZhao, MingMingZhaovan der Heide, PaulPaulvan der HeideVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-2720190304-3991https://imec-publications.be/handle/20.500.12860/33626Atom probe of GaN/AlGaN heterostructures: the role of electric field, sample crystallography and laser excitation on quantificationJournal articlehttps://doi.org/10.1016/j.ultramic.2019.112813