Van Dijk, LeonLeonVan DijkMileham, JeffreyJeffreyMilehamMalakhovsky, IljaIljaMalakhovskyLaidler, DavidDavidLaidlerDekkers, HaroldHaroldDekkersVan Elshocht, SvenSvenVan ElshochtAnberg, DougDougAnbergOwen, David M.David M.Owenvan Haren, RichardRichardvan Haren2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29666Wafer shape based in-plane distortion predictions using superfast 4G metrologyProceedings paper10.1117/12.2257475