On factors affecting the extraction of elastic modulus by nanoindentation of organic polymer films

Iacopi, FrancescaFrancescaIacopiLaknin, M.M.LakninMulloy, A.A.Mulloyden Toonder, J.M.JJ.M.Jden ToonderVanhaeren, DanielleDanielleVanhaerenBrongersma, SywertSywertBrongersma2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10629On factors affecting the extraction of elastic modulus by nanoindentation of organic polymer filmsProceedings paper