Diffractive phase-shift lithography photomask operating in proximity printing mode

Cirino, GiuseppeGiuseppeCirinoMansano, RonaldoRonaldoMansanoVerdonck, PatrickPatrickVerdonckCescato, LucilaLucilaCescatoGoncalves Neto, LuizLuizGoncalves Neto2021-10-182021-10-1820101094-4087https://imec-publications.be/handle/20.500.12860/16871Diffractive phase-shift lithography photomask operating in proximity printing modeJournal articlehttp://www.opticsinfobase.org/view_article.cfm?gotourl=http%3A%2F%2Fwww%2Eopticsinfobase%2Eorg%2FDirectPDFAccess%2F33421FF0%2DBD