Snoeckx, KoenKoenSnoeckxBaert, KrisKrisBaertVan Hoof, ChrisChrisVan HoofBeyne, EricEricBeyne2021-10-162021-10-162005-04https://imec-publications.be/handle/20.500.12860/11230Advances in system integration and MEMS packagingJournal article