Understanding frequency dependence of trap generation under AC negative bias temperature instability stress in Si p-FinFETs

Zhou, L.L.ZhouZhang, Q.Q.ZhangYang, H.H.YangJi, Z.Z.JiZhang, Z.Z.ZhangLiu, Q.Q.LiuXu, H.H.XuTang, B.B.TangSimoen, EddyEddySimoenMa, X.X.MaWang, X.X.WangLi, Y.Y.LiYin, H.H.YinLuo, J.J.LuoZhao, C.C.ZhaoWang, W.W.Wang2021-10-292021-10-2920200741-3106https://imec-publications.be/handle/20.500.12860/36416Understanding frequency dependence of trap generation under AC negative bias temperature instability stress in Si p-FinFETsJournal articlehttps://ieeexplore.ieee.org/document/9086034