Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranes

Verhaegen, KatarinaKatarinaVerhaegenBaert, KrisKrisBaertPuers, BobBobPuersSansen, WillyWillySansenHermans, LouLouHermansMertens, RobertRobertMertens2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3997Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranesJournal article