Design compliance for Spacer Is Dielectric (SID) patterning

Luk-Pat, GerardGerardLuk-PatMiloslavsky, AlexAlexMiloslavskyPainter, BenBenPainterLin, LiLiLinDe Bisschop, PeterPeterDe BisschopLucas, KevinKevinLucas2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21067Design compliance for Spacer Is Dielectric (SID) patterningProceedings paper