Mitard, JeromeJeromeMitardMartens, KoenKoenMartensDe Jaeger, BriceBriceDe JaegerFranco, JacopoJacopoFrancoShea, ChrisChrisSheaPlourde, ChelseaChelseaPlourdeLeys, FrederikFrederikLeysLoo, RogerRogerLooHellings, GeertGeertHellingsEneman, GeertGeertEnemanWang, Wei-EWei-EWangLin, VicVicLinKaczer, BenBenKaczerDe Meyer, KristinKristinDe MeyerHoffmann, Thomas Y.Thomas Y.HoffmannDe Gendt, StefanStefanDe GendtCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-10-182021-10-182009-09https://imec-publications.be/handle/20.500.12860/15876Impact of Epi-Si growth temperature on Ge-pFET performanceProceedings paper