Overcoming EUV mask blank defects: what we can, and what we should

Jonckheere, RikRikJonckheere2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28609Overcoming EUV mask blank defects: what we can, and what we shouldProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2644787