Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective deposition

Pasquali, MattiaMattiaPasqualiDe Gendt, StefanStefanDe GendtArmini, SilviaSilviaArmini2022-02-182022-02-1820210169-4332WOS:000599531700007https://imec-publications.be/handle/20.500.12860/38886Understanding the impact of Cu surface pre-treatment on Octadecanethiol-derived self-assembled monolayer as a mask for area-selective depositionJournal article10.1016/j.apsusc.2020.148307WOS:000599531700007ATOMIC LAYER DEPOSITIONOXIDIZED METALSN-ALKANETHIOLSTHIN-FILMSCOPPERGOLDKINETICSORIENTATIONCHEMISTRYPLATINUM